JPH03109228A - 高純度石英母材製造用加熱炉 - Google Patents
高純度石英母材製造用加熱炉Info
- Publication number
- JPH03109228A JPH03109228A JP1246332A JP24633289A JPH03109228A JP H03109228 A JPH03109228 A JP H03109228A JP 1246332 A JP1246332 A JP 1246332A JP 24633289 A JP24633289 A JP 24633289A JP H03109228 A JPH03109228 A JP H03109228A
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- gas
- furnace
- impermeable
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 239000010453 quartz Substances 0.000 title claims abstract description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 45
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 45
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 35
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims description 32
- 239000003779 heat-resistant material Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 3
- 239000011247 coating layer Substances 0.000 description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000018044 dehydration Effects 0.000 description 4
- 238000006297 dehydration reaction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910004014 SiF4 Inorganic materials 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 3
- 238000000280 densification Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004334 fluoridation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000005352 clarification Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
- C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Thermal Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246332A JPH03109228A (ja) | 1989-09-25 | 1989-09-25 | 高純度石英母材製造用加熱炉 |
| CA002025880A CA2025880A1 (en) | 1989-09-25 | 1990-09-20 | Furnace for production of optical fiber preform |
| KR9015203A KR930004550B1 (en) | 1989-09-25 | 1990-09-25 | Furnace for production of optical fiber preform |
| EP92112265A EP0509564B1 (en) | 1989-09-25 | 1990-09-25 | Furnace for production of optical fiber preform |
| DE69012350T DE69012350T2 (de) | 1989-09-25 | 1990-09-25 | Ofen für die Herstellung von Vorformen für optische Faser. |
| EP90118393A EP0420148B1 (en) | 1989-09-25 | 1990-09-25 | Furnace for production of optical fiber preform |
| DE90118393T DE69005246T2 (de) | 1989-09-25 | 1990-09-25 | Ofen für die Herstellung einer optischen Faservorform. |
| AU63134/90A AU637403B2 (en) | 1989-09-25 | 1990-09-25 | Furnace for production of optical fiber preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246332A JPH03109228A (ja) | 1989-09-25 | 1989-09-25 | 高純度石英母材製造用加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109228A true JPH03109228A (ja) | 1991-05-09 |
| JPH0536372B2 JPH0536372B2 (en]) | 1993-05-28 |
Family
ID=17146992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1246332A Granted JPH03109228A (ja) | 1989-09-25 | 1989-09-25 | 高純度石英母材製造用加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109228A (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6845636B2 (en) | 2000-09-01 | 2005-01-25 | Sumitomo Electric Industries, Ltd. | Apparatus for dehydrating and consolidating an optical fiber preform and method of the same |
| JP2006188424A (ja) * | 2004-12-29 | 2006-07-20 | Corning Inc | 高透過率合成シリカガラスおよびその製造方法 |
| EP1136452A4 (en) * | 1998-10-21 | 2010-09-01 | Sumitomo Electric Industries | DEVICE AND METHOD FOR PRODUCING MATERIALS BASED ON POROUS GLASSES |
-
1989
- 1989-09-25 JP JP1246332A patent/JPH03109228A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1136452A4 (en) * | 1998-10-21 | 2010-09-01 | Sumitomo Electric Industries | DEVICE AND METHOD FOR PRODUCING MATERIALS BASED ON POROUS GLASSES |
| US6845636B2 (en) | 2000-09-01 | 2005-01-25 | Sumitomo Electric Industries, Ltd. | Apparatus for dehydrating and consolidating an optical fiber preform and method of the same |
| JP2006188424A (ja) * | 2004-12-29 | 2006-07-20 | Corning Inc | 高透過率合成シリカガラスおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0536372B2 (en]) | 1993-05-28 |
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